| 摘要 |
PROBLEM TO BE SOLVED: To provide a stator element for Holweck pump stage basically forming a cylindrical original shape or an assembled product for the stator element for Holweck pump stage basically forming a cylindrical original shape, and further a vacuum pump having Holweck pump stage, a method for manufacturing the stator element for Holweck pump stage and a method for manufacturing the assembled product for the stator element for Holweck pump stage.SOLUTION: The problem is resolved by an arrangement in which either a stator element or an assembled product has a plurality of stator parts 12, 12', 12" separated from each other and the stator parts 12, 12', 12" are assembled in the stator elements or can be assembled in the stator elements. |
