发明名称 PELLICLE
摘要 PROBLEM TO BE SOLVED: To provide a pellicle which does not cause loosening for a long period owing to a preferable cross-sectional shape of an adhesive layer and has an excellent appearance.SOLUTION: A pellicle is adhered with a pellicle film through an adhesive layer applied to one frame surface of a pellicle frame, and the cross-sectional shape on the side opposite to the pellicle film of the adhesive layer is configured with a convex curve of a curvature radius of R10 to R1000. The convex curve is preferably nearly bow-shaped.
申请公布号 JP2014215572(A) 申请公布日期 2014.11.17
申请号 JP20130095025 申请日期 2013.04.30
申请人 SHIN ETSU CHEM CO LTD 发明人 HORIKOSHI JUN
分类号 G03F1/64 主分类号 G03F1/64
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