| 摘要 |
<p>A susceptor is provided in which wasteful space is minimized in the outermost peripheral portion and the maximum number of recesses are disposed, by modifying a recess arrangement of an outermost peripheral recess array, which is disposed on an outer peripheral portion of a plurality of recess arrays that are disposed in a closest packed arrangement in a honeycomb-shaped pattern structure. Each of recesses located at vertices of a second recess array (A2), which is the outermost periphery of concentric hexagonal recess arrays (A1) and (A2) in a honeycomb-shaped pattern, is substantially in point contact with two recesses forming the outermost peripheral recess array (A3), and those two recesses are substantially in point contact with each other. The same number of recesses as the number of the recesses disposed between a vertex (B2) and a vertex (B1) of the recess array (A2) are disposed between a recess (M(3)-C) and a recess (M(3)-B) of the outermost peripheral recess array (A3), and the same number of recesses as the number of the recesses disposed between the vertex (B2) and a vertex (B3) of the recess array (A2) are disposed between a recess (M(3)-D) and a recess (M(3)-E) of the outermost peripheral recess array (A3).</p> |
