发明名称 |
FILLING DEVICE, METHOD, AND ANALYZER |
摘要 |
PROBLEM TO BE SOLVED: To provide a filling device for improving an accuracy of a filling amount of several milligrams of fine particles without breaking a shape of the fine particles.SOLUTION: The filling device includes: a slurry container 14a; an optical detection part composed of a light source for measuring an absorbance in the slurry container and a light receiving part; and a calculation system 45 for deciding a suction amount of slurry based on the absorbance in the slurry container. Alternately, the filling device includes: actuators 56, 57 for adjusting measurement positions of the light source and the light receiving part; a control unit 50 for controlling the actuators; and the calculation system 45 for deciding a suction position of the slurry from the absorbance in the slurry container. Alternately, the filling device controls a rotation speed of the slurry from the absorbance in the slurry container by a stirrer 55 for controlling a rotation speed of the slurry in the slurry container and a control unit for controlling the stirrer 55. |
申请公布号 |
JP2014215123(A) |
申请公布日期 |
2014.11.17 |
申请号 |
JP20130091540 |
申请日期 |
2013.04.24 |
申请人 |
HITACHI HIGH-TECHNOLOGIES CORP |
发明人 |
YABUHARA TADAO;ITO SHINYA |
分类号 |
G01N30/56;G01N30/06;G01N30/26;G01N30/74;G01N30/78;G01N30/86 |
主分类号 |
G01N30/56 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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