发明名称 FILLING DEVICE, METHOD, AND ANALYZER
摘要 PROBLEM TO BE SOLVED: To provide a filling device for improving an accuracy of a filling amount of several milligrams of fine particles without breaking a shape of the fine particles.SOLUTION: The filling device includes: a slurry container 14a; an optical detection part composed of a light source for measuring an absorbance in the slurry container and a light receiving part; and a calculation system 45 for deciding a suction amount of slurry based on the absorbance in the slurry container. Alternately, the filling device includes: actuators 56, 57 for adjusting measurement positions of the light source and the light receiving part; a control unit 50 for controlling the actuators; and the calculation system 45 for deciding a suction position of the slurry from the absorbance in the slurry container. Alternately, the filling device controls a rotation speed of the slurry from the absorbance in the slurry container by a stirrer 55 for controlling a rotation speed of the slurry in the slurry container and a control unit for controlling the stirrer 55.
申请公布号 JP2014215123(A) 申请公布日期 2014.11.17
申请号 JP20130091540 申请日期 2013.04.24
申请人 HITACHI HIGH-TECHNOLOGIES CORP 发明人 YABUHARA TADAO;ITO SHINYA
分类号 G01N30/56;G01N30/06;G01N30/26;G01N30/74;G01N30/78;G01N30/86 主分类号 G01N30/56
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