| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate inspection device that realizes high-speed inspection while removing impact of thermoelectromotive force.SOLUTION: A control unit 27 and a signal switching unit 26 form a voltage measurement loop via multiple circuit patterns 41 and 42 to be measured. The control unit 27 in a correction voltage measuring step uses a voltage measuring unit 19 to measure thermoelectromotive force Vwhile an electric current is supplied to neither one of the circuit patterns 41 and 42 to be measured. The control unit 27 in a circuit pattern measuring step uses the voltage measuring unit 19 to measure a voltage drop while the electric current is supplied to either one of the circuit patterns 41 and 42 to be measured. The control unit 27 in a correction step uses a value of the thermoelectromotive force Vmeasured in the correction voltage measuring step to correct the voltage drop measured in the circuit pattern measuring step. Then, the control unit 27 executes the circuit pattern measuring step and the correction step, with respect to each of the circuit patterns 41 and 42 to be measured. |
