PROTECTIVE FILM DETECTION APPARATUS

摘要

PROBLEM TO BE SOLVED: To confirm whether a protection film has been applied to the whole surface when a surface to be processed of an object to be processed is coated with the protective film.SOLUTION: A protective film detection apparatus includes: a holding table 2 for holding an object to be processed having a surface coated with a protective film; water vapor injection means 100 which injects water vapor to the surface of the object held on the holding table 2; imaging means 101 which images the whole surface of the object with water vapor injected thereon; detection means 102 which detects a non-coated area from a difference in light intensity between a coated area coated with the protective film and the non-coated area where the protective film is not applied and water droplet irregularity is formed due to the water vapor deposited thereon to generate light diffusion, by image processing from image information of the surface imaged by the imaging means 101; and notification means 103 which gives information on the non-coated area detected by the detection means 102. Laser treatment is applied from the surface side of the object to be processed with the non-coated area, to prevent debris from being deposited on the non-coated area.