| 摘要 |
PROBLEM TO BE SOLVED: To provide a technology which commonizes drawing data in a plurality of shot regions, and is advantageous in terms of drawing precision.SOLUTION: A drawing apparatus includes: a plurality of charged particle optical systems which are arranged along a first direction and each of which irradiates a plurality of charged particle rays onto a substrate; a stage which holds the substrate and moves in a second direction orthogonal to the first direction, with regard to the plurality of charged particle optical systems; and a control unit which determines a charged particle ray used by each of the plurality of charged particle optical systems for drawing among the plurality of charged particle rays such that SW=Pc/α=Ps/&bgr;(α, &bgr; are natural number) is satisfied, where, Ps is an array pitch in the first direction of shot regions on the substrate, SW is a width in the first direction of each of the plurality of drawing regions on the substrate by the plurality of charged particle optical systems, and Pc is an array pitch in the first direction of the plurality of drawing regions. |
