发明名称 HANDLER AND INSPECTION DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a handler and an inspection device capable of heating an object quickly and evenly.SOLUTION: The handler comprises a rotary unit 97 which is a holding unit mounting unit capable of being placed into a mounting state in which a holding unit 20 for holding an IC device 100 is mounted, and a transport mechanism 9 for transporting the IC device 100 held in the holding unit 20. The rotary unit 97 has a heat generation unit 973 for generating heat, and a heating passage 972 through which a fluid Q used for heating the IC device 100 heated by the heat generation unit 973 passes.
申请公布号 JP2014215062(A) 申请公布日期 2014.11.17
申请号 JP20130090050 申请日期 2013.04.23
申请人 SEIKO EPSON CORP 发明人 IMAI TAKAYUKI;MIYAMOTO HARUHIKO;TAKADA FUYUMI;SHIMOJIMA SOKO
分类号 G01R31/26 主分类号 G01R31/26
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