| 摘要 |
PROBLEM TO BE SOLVED: To provide a heat treatment apparatus which can perform heat treatment of an object to be treated with high temporal efficiency.SOLUTION: A heat treatment apparatus includes: a plurality of light irradiation parts which have flash lamps for heating an object to be irradiated by irradiating the object with light; a power supply part which has a common capacitor for supplying power for the respective light irradiation parts; and a control unit for controlling the power supply part. The heat treatment apparatus performs heat treatment of the object to be treated by repeating an action to select one of the plurality of light irradiation parts and turn on the flash lamp subsequently with respect to each of the plurality of light irradiation parts. The plurality of light irradiation parts are provided with temperature measurement means respectively. The control unit selects another light irradiation part whose temperature for determination does not reach a preset operation control temperature when a temperature for determination of any of the plurality of light irradiation parts has reached the preset operation control temperature, and turns on the flash lamp. |
