| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a holding device advantageous for moving together with a stage.SOLUTION: The holding device for holding a substrate by electrostatic force has a base including an electrode for generating the electrostatic force, a plurality of pins provided on the upper surface of the base, and a sealing part provided on the upper surface and sealing a first space surrounding the plurality of pins. A cavity, and a first through hole penetrating between the cavity and the first space are formed in the base. When the substrate is held on the pins and the sealing part by the electrostatic force, gas in the first space, first through hole, and cavity is sealed in the vacuum.</p> |
