LIGHT SOURCE DEVICE, INSPECTION DEVICE, AND WAVELENGTH CONVERSION METHOD

摘要

PROBLEM TO BE SOLVED: To provide a light source device, inspection device, and wavelength conversion method capable of generating DUV light with a simple configuration.SOLUTION: The light source device of one embodiment of the present invention includes: a first laser light source 11 for generating a first laser beam of a wavelength of 932-936 nm; a second laser light source 12 for generating a second laser beam of a wavelength of 1111-1130 nm; first wavelength converting means 20 for generating the fourth harmonic wave of the first laser beam; and second wavelength converting means 30 having a CLBO crystal 235 for generating DUV light of a wavelength of 193.2-193.6 nm by sum frequency mixing of the fourth harmonic wave and the second laser beam.