| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a drawing apparatus which is advantageous in performing overlap-drawing on a substrate with a plurality of charged particle systems.SOLUTION: A drawing apparatus for drawing with a charged particle ray on a substrate includes: a plurality of charged particle optical systems each of which has a function for separately blanking a plurality of charged particle rays arrayed in a first direction, and which is arranged in the first direction with an interval each other; a stage which holds and moves the substrate; and a control unit which controls drawing being performed by the movement of the stage and the blanking function of each of the plurality of charged particle optical systems. The control unit performs the control such that, with regard to a first charged particle optical system reaching the plurality of charged particle rays on a first region and a second region adjoining in the first direction formed on the substrate, among the plurality of charged particle optical systems, the drawing is made with a part of a first charged particle ray among the plurality of charged particle rays only on one region of the first region and the second region while the stage is moved in the second direction.</p> |
