| 摘要 |
PROBLEM TO BE SOLVED: To provide a squareness measuring device capable of accurately measuring squareness of a measured object.SOLUTION: A squareness measuring device 1 for measuring squareness of a measured object W includes: a transparent substrate 12 having a placing surface where the measured object W is placed; a tool 13 having a first surface 19A orthogonal to the placing surface and a second surface 19B orthogonal to the placing surface and the first surface 19A, and fixed on the placing surface; and an illumination light source 10 for illuminating the substrate 12 from the surface side on the opposite side to the placing surface of the substrate 12. |
