| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide an airtight leakage inspection device capable of reliably detecting an airtight leakage and having a simple structure quick in inspection processing speed without causing a damage to an article inside an object to be inspected.SOLUTION: The leakage inspection device is configured such that belt conveying surfaces of two belt-conveyors having a non-permeable belt vertically disposed opposite to each other are arranged in parallel so as to be defined as upstream side conveyors and the belt conveying surfaces of the two belt-conveyors vertically disposed opposite to each other via a slight gap immediately after the upstream side conveyors are arranged in parallel so as to be defined as downstream side conveyors. An object to be inspected which is sandwiched between an upper belt and a lower belt is conveyed while being vertically pressurized, and a gas leaked from the object to be inspected which passes through a slight gap between a preceding belt and a subsequent belt can be detected with high accuracy without being diffused in the surrounding. The leakage inspection device is also made adaptable to a high speed conveyance of the object to be inspected.</p> |
