发明名称 STRIPPER COMPOSITION FOR REMOVING PHOTORESIST AND STRIPPING MTHOD OF PHOTORESIST USING THE SAME
摘要 The present invention relates to a stripper composition to remove photoresist, the stripper composition exhibiting excellent photoresist removing and stripping performance and also being able to effectively suppress the generation or residue of a stain or a foreign substance on a lower layer containing copper, etc., and to a method of stripping photoresist using the same. The stripper composition to remove photoresist includes: at least one amine compound; a polar organic solvent; an alkylene glycol-based solvent; and an anticorrosive agent.
申请公布号 KR20140132271(A) 申请公布日期 2014.11.17
申请号 KR20140050060 申请日期 2014.04.25
申请人 LG CHEM. LTD. 发明人 LEE, WOO RAM;JUNG, DAE CHUL;LEE, DONG HOON;PARK, TAE MOON
分类号 G03F7/42;H01L21/027 主分类号 G03F7/42
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