发明名称 |
STRIPPER COMPOSITION FOR REMOVING PHOTORESIST AND STRIPPING MTHOD OF PHOTORESIST USING THE SAME |
摘要 |
The present invention relates to a stripper composition to remove photoresist, the stripper composition exhibiting excellent photoresist removing and stripping performance and also being able to effectively suppress the generation or residue of a stain or a foreign substance on a lower layer containing copper, etc., and to a method of stripping photoresist using the same. The stripper composition to remove photoresist includes: at least one amine compound; a polar organic solvent; an alkylene glycol-based solvent; and an anticorrosive agent. |
申请公布号 |
KR20140132271(A) |
申请公布日期 |
2014.11.17 |
申请号 |
KR20140050060 |
申请日期 |
2014.04.25 |
申请人 |
LG CHEM. LTD. |
发明人 |
LEE, WOO RAM;JUNG, DAE CHUL;LEE, DONG HOON;PARK, TAE MOON |
分类号 |
G03F7/42;H01L21/027 |
主分类号 |
G03F7/42 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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