ASYMMETRIC GROOVE SHAPE WAFER CASSETTE

摘要

PROBLEM TO BE SOLVED: To provide an asymmetric groove shape wafer cassette capable of easily accommodating a substrate such as a semiconductor wafer in a warped shape and suppressing flapping of the substrate within a groove.SOLUTION: A plurality of substrate support plate-like parts 50 provided on one sidewall of an asymmetric groove shape wafer cassette 1 extend in a direction crossing a normal of one inner face 255. A plurality of substrate support plate-like parts 60 provided on another sidewall are formed asymmetric to the plurality of substrate support plate-like parts 50 provided on the one side wall, thereby a shape of a groove 256 between the substrate support plate-like parts 50 on the one sidewall and a shape of a groove 266 between the substrate support plate-like parts 60 on the other sidewall are different.