| 摘要 |
PROBLEM TO BE SOLVED: To efficiently perform measurement in a wide measuring range.SOLUTION: An image measuring apparatus includes: a stage on which a measuring object is placed; an imaging device which is provided so as to be relatively movable with respect to the stage and outputs image information by imaging the measuring object on a prescribed imaging range narrower than the measuring range; a position control device which makes the imaging device move to a plurality of measuring positions within the measuring range and scan in a direction vertical to the stage at each measuring position; and an arithmetic processing device which performs measuring processing for calculating displacement in a scanning direction at each measuring position on the basis of the image information of the prescribed imaging range at each measuring position obtained by scanning of the imaging device. The arithmetic processing device divides the measuring range into a plurality of actual measuring visual field ranges and performs the measuring processing only on the actual measuring visual field range selected as a measuring object range among the plurality of actual measuring visual field ranges. |
