发明名称 SHEET STICKING DEVICE AND SHEET STICKING METHOD
摘要 PROBLEM TO BE SOLVED: To provide a sheet sticking device which allows an adhesive sheet to be stuck to a body to be stuck so that the reference part thereof can be recognized by other device, and to provide a sticking method.SOLUTION: A sheet sticking device 1 includes supply means 2 for supplying an adhesive sheet AS, press means 3 for pressing and sticking the adhesive sheet AS to a body to be stuck WF having a reference part VN formed at a predetermined position, and marking means for giving a predetermined mark for position recognition, having a predetermined positional regularity for the reference part VN, at a predetermined position in a region of the adhesive sheet AS stuck to the body to be stuck WF.
申请公布号 JP2014216551(A) 申请公布日期 2014.11.17
申请号 JP20130094164 申请日期 2013.04.26
申请人 LINTEC CORP 发明人 OKAMOTO KOJI;WATANABE KENICHI
分类号 H01L21/683;H01L21/301 主分类号 H01L21/683
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