| 摘要 |
PROBLEM TO BE SOLVED: To suppress the mixing of noise into a sensor signal while suppressing the enlargement of a physical quantity sensor.SOLUTION: A sensor portion 10 and a cap portion 60 are laminated, and a circuit element 62 is formed at either one of the sensor portion 10 or the cap portion 60. On the other surface 10b on the opposite side to the cap portion 60 in the sensor portion 10, a first metal film 53 is formed, and on the other surface 60b on the opposite side to the sensor portion 10 in the cap portion 60, a second metal film 92 is formed. On the sensor portion 10 and the cap portion 60, penetrating grooves 50 and 70 penetrating in a laminating direction of the sensor portion 10 and the cap portion 60 and surrounding a sensing portion 15 and the circuit element 62 are formed. In the penetrating grooves 50 and 70, third metal films 52 and 72 electrically connected to the first and second metal films 53 and 92 are embedded. The sensing portion 15 and the circuit element 62 are surrounded by the first-third metal films 52, 53, 72, and 92. |
