| 摘要 |
PROBLEM TO BE SOLVED: To clarify timing and a dielectric breakdown voltage when discharge is generated in a test sample such as a substrate in a test using an electrostatic discharge (ESD) test device.SOLUTION: The discharge generation status estimation device estimates discharge or a dielectric breakdown status generated when an electrostatic discharge tester applies an impulse voltage or current to a test sample. An electromagnetic wave antenna measures radiation electromagnetic wave signals generated from the electrostatic discharge tester and the test sample, respectively, when the electrostatic discharge tester is driven and discharged or subjected to the dielectric breakdown. An estimation part main body acquires and displays dielectric breakdown generation timing TFO and a dielectric breakdown voltage VFO after the voltage application, obtained from a time difference between an application voltage generation time obtained from the radiation electromagnetic wave signal generated when the electrostatic discharge tester is driven and a discharge generation time obtained from the radiation electromagnetic wave signal generated when the dielectric breakdown is generated. |
