| 摘要 |
PROBLEM TO BE SOLVED: To provide a device which is capable of efficiently and neatly cleaning washing surface of plate-like work.SOLUTION: Holding means 10 installed on a cleaning device 1 is equipped at least with a holding table 11 which sucks and holds a work set 5, holding means 14 holding a ring frame 4, and a lifting and lowering device 15 which lifts and lowers the holding means 14 to form an adhesive sheet 3 in a shape of mortar by the lifting and lowering device 15 which lifts the holding means 14 holding the ring frame 4 inside which a liquid layer 7 is formed by providing cleaning liquid 6 through a cleaning liquid supply nozzle 30 to submerge a plate-like work 2. Accordingly, machining chips adhering to an upper surface of the plate-like work 2 is capable of being floated into the liquid layer 7 of the cleaning liquid 6 and it is not necessary to clean by repeatedly spraying cleaning liquid onto the upper surface of the plate-like work 2. Thus it is capable of cleaning efficiently and neatly without producing washing spots on the upper surface of the plate-like work 2. |
