发明名称 Etching Solution
摘要 <p>An etchant solution is provided to selectively etch only nickel from a material to be processed in which nickel and other metal coexist by containing a polymer acting as a metal corrosion controller excepting nickel. A nickel etchant solution comprises a polymer having at least one repeating unit selected from chemical formula I, II and III; nitric acid or sulfuric acid; hydrogen peroxide; and water. In chemical formulas, R1-R5 are hydrogen, amino group, imino group, cyano group, azo group, thiol group, sulfo group, hydroxyl group, carbonyl group, carboxyl group, nitro group, alkyl group, cycloalkyl group, aryl group or benzyl group.</p>
申请公布号 KR101462286(B1) 申请公布日期 2014.11.14
申请号 KR20090001887 申请日期 2009.01.09
申请人 发明人
分类号 C09K13/04 主分类号 C09K13/04
代理机构 代理人
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