发明名称 Method for manufacturing patterned graphene
摘要 <p>PURPOSE: A manufacturing method of patterned graphene, and patterned graphene manufactured thereby are provided to realize a large area process. CONSTITUTION: A manufacturing method of patterned graphene comprises the steps of: forming a graphene layer on a catalyst metal layer; forming a patterned film on the graphene layer; positioning a support layer on the patterned film; removing the catalyst metal layer; patterning the graphene layer by removing the patterned film; positioning a substrate (50) on the patterned graphene layer (21); and removing the support layer.</p>
申请公布号 KR101461978(B1) 申请公布日期 2014.11.14
申请号 KR20120018360 申请日期 2012.02.23
申请人 发明人
分类号 C01B31/02;G03F7/004;H01L21/302 主分类号 C01B31/02
代理机构 代理人
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