| 摘要 |
PROBLEM TO BE SOLVED: To provide a device for reliably holding a disc-like article.SOLUTION: A device for treating a disc-like article with a fluid comprises: a chuck 120 for holding and rotating a disc-like article around an axis perpendicular to the disc-like article; a chuck base body 121; a drive ring 130; and gripping members 128 for contacting the disc-like article at its edge. The gripping members are eccentrically movable with respect to the center of the disc-like article, and the eccentric movement of the gripping members is driven by a drive ring. The drive ring is mounted to the base body, so that the drive ring is rotatable against the base body around the axis A so as to drive the gripping members. The relative rotational movement of the drive ring against the base body is carried out by either holding the base body and rotating the drive ring or by holding the drive ring and rotating the base body, and the drive ring or the base body is held without touching respective parts by a magnetic force. |
