发明名称 DECOUPLING CAPACITOR FOR FINFET COMPATIBLE PROCESS
摘要 <p>A decoupling capacitor formed from a fin field-effect transistor (FinFET) and method of using the same are provided. An embodiment decoupling capacitor includes a fin field-effect transistor (FinFET) having a semiconductor substrate supporting a gate stack, a source, and a drain, a first terminal coupled to the semiconductor substrate and to the gate stack, the first terminal configured to couple with a first power rail, and a second terminal coupled to the source and to the drain, the second terminal configured to couple with a second power rail having a higher potential than the first power rail.</p>
申请公布号 KR101461792(B1) 申请公布日期 2014.11.13
申请号 KR20130033424 申请日期 2013.03.28
申请人 发明人
分类号 H01L21/8242;H01L27/108 主分类号 H01L21/8242
代理机构 代理人
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