| 摘要 |
PROBLEM TO BE SOLVED: To provide a scanning charged particle beam microscope in which axis alignment can be facilitated.SOLUTION: In a scanning charged particle beam microscope 100, a control section 22 generates a first control signal for controlling some of multistage deflectors 31, 32, and a second control signal for controlling some of other multistage deflectors 31, 32. The first control signal includes first scan rotation information for rotating the scanning direction of a charged particle beam EB by a first angle, and the second control signal includes second scan rotation information for rotating the scanning direction of a charged particle beam EB by a second angle. The control section 22 outputs the first control signal and second control signal to a scanning section 3 while differentiating the first angle and second angle. The scanning section 3 scans the charged particle beam EB on an aperture 9 based on the first control signal and second control signal, and an image generating section 24 generates an aperture image based on the detection results from a detector 6. |
