BOATS CONFIGURED TO OPTIMIZE VAPORIZATION OF PRECURSOR MATERIALS BY MATERIAL DEPOSITION APPARATUSES

摘要

A boat according to this disclosure includes side walls and a base that are arranged to define a container with an interior. A bottom of the boat may have a convex configuration. In a specific embodiment, the base may have a convex configuration, such as the shape of a portion of the curved surface of a cylinder, with end walls located at opposite ends of the base. Such a boat may have a crescent configuration. Each boat may be configured to be positioned against another boat, enabling the assembly of groups of boats. Multi-celled structures that receive and effectively increase the surface area of precursor material are also disclosed. A multi-celled structure may be configured for use within the interior of a boat, or individually, without a separate boat. Vaporization chambers that are configured to receive the boats and/or multi-celled structures and material deposition apparatuses that include the vaporization chambers are also disclosed, as are methods for introducing precursor materials into material deposition apparatuses.

主权项

1. A material deposition apparatus, comprising:
a vaporization chamber including a concave surface for receiving at least one boat; and at least one boat for introducing a precursor material into the vaporization chamber, the at least one boat including a convex surface configured complementarily to the concave surface of the vaporization chamber.