发明名称 GLASS FILM MANUFACTURING METHOD AND ELECTRONIC DEVICE MANUFACTURING METHOD
摘要 [Problem] To provide: a glass film manufacturing method that enables a glass film to be easily and inexpensively peeled from a support glass, even in manufacturing-related post-processing involving the application of heat; and an electronic device manufacturing method. [Solution] This glass film manufacturing method comprises: a first step in which a glass film laminate (1) is produced by laminating a glass film (11) and a support glass (12) that have undergone manufacturing-related pre-processing; a second step in which a manufacturing-related process involving the application of heat to the glass film (11) in the glass film laminate (1) is performed; and a third step in which the post-processed glass film laminate (1) is split into the glass film (11) and the support glass (12) obtained by implementing the manufacturing-related process. In the third step, either the glass film (11) or the support glass (12) is peeled from the other while a pressurized liquid (4) is applied to an interface (13) between the glass film (11) and the support glass (12) in the glass film laminate (1).
申请公布号 WO2014181855(A1) 申请公布日期 2014.11.13
申请号 WO2014JP62435 申请日期 2014.05.09
申请人 NIPPON ELECTRIC GLASS CO., LTD. 发明人 YAMAZAKI YASUO
分类号 C03C17/23;B32B7/06;B65G49/06;H01L21/683;H01L51/50;H05B33/02 主分类号 C03C17/23
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