MICROLITHOGRAPHY PROJECTION OBJECTIVE

摘要

Microlithography projection objectives for imaging into an image plane a pattern arranged in an object plane are described with respect to suppressing false light in such projection objectives.

主权项

1. A projection objective, comprising:
a plurality of optical elements configured to image a pattern in an object plane along a light path through the projection objective into an image plane, the plurality of optical elements comprising first optical element; a first stop; and a second stop, wherein:
along the light path, the only optical element between the first and second stops is the first optical element; andthe projection objective is a microlithography projection objective.