发明名称 |
METHODS FOR THE SYNTHESIS OF ARRAYS OF THIN CRYSTAL GRAINS OF LAYERED SEMICONDUCTORS SNS2 AND SNS AT DESIGNED LOCATIONS |
摘要 |
Methods of producing arrays of thin crystal grains of layered semiconductors, including the creation of stable atomic-layer-thick to micron-thick membranes of crystalline semiconductors by chemical vapor deposition. |
申请公布号 |
US2014332814(A1) |
申请公布日期 |
2014.11.13 |
申请号 |
US201414270973 |
申请日期 |
2014.05.06 |
申请人 |
The University of Houston System |
发明人 |
Peng Haibing;Su Guoxiong;De Debtanu |
分类号 |
H01L21/02;H01L29/04 |
主分类号 |
H01L21/02 |
代理机构 |
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代理人 |
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主权项 |
1. A method of producing a semiconductor crystal grain on a substrate, comprising the steps of:
a) producing a defect or catalytic site on the substrate; and b) heating a first solid material source and a second solid material source in the presence of the substrate;wherein the first solid material source and the second solid material source are heated sufficiently to form a vapor; andwherein the vapors of the first material source and the second material source are deposited on the substrate at the defect or catalytic site to form a semiconductor crystal grain. |
地址 |
Houston TX US |