发明名称 METHODS FOR THE SYNTHESIS OF ARRAYS OF THIN CRYSTAL GRAINS OF LAYERED SEMICONDUCTORS SNS2 AND SNS AT DESIGNED LOCATIONS
摘要 Methods of producing arrays of thin crystal grains of layered semiconductors, including the creation of stable atomic-layer-thick to micron-thick membranes of crystalline semiconductors by chemical vapor deposition.
申请公布号 US2014332814(A1) 申请公布日期 2014.11.13
申请号 US201414270973 申请日期 2014.05.06
申请人 The University of Houston System 发明人 Peng Haibing;Su Guoxiong;De Debtanu
分类号 H01L21/02;H01L29/04 主分类号 H01L21/02
代理机构 代理人
主权项 1. A method of producing a semiconductor crystal grain on a substrate, comprising the steps of: a) producing a defect or catalytic site on the substrate; and b) heating a first solid material source and a second solid material source in the presence of the substrate;wherein the first solid material source and the second solid material source are heated sufficiently to form a vapor; andwherein the vapors of the first material source and the second material source are deposited on the substrate at the defect or catalytic site to form a semiconductor crystal grain.
地址 Houston TX US