METHOD FOR MANUFACTURING METAL-OXIDE THIN FILM USING LOW TEMPERATURE PROCESS, THIN FILM, AND ELECTRIC DEVICE THEREOF
摘要
<p>Disclosed is an ultraviolet lamp device for sintering an oxide thin film using a solution process. The ultraviolet lamp device includes a sample mounting part; a housing which has a structure which surrounds the sample mounting part and includes a chamber space in side; an ultraviolet lamp part which faces the sample mounting part in the upper part of a chamber space and emits ultraviolet rays downwards; and an inert gas injection part which injects inert gas into a sample which is mounted on the sample mounting part and is formed in a region of the housing.</p>
