MANUFACTURING METHOD OF METAL WIRE AND THIN TRANSISTOR ARRAY PANEL, AND ORGANIC LIGHT EMITTING DIODE DISPLAY

摘要

A manufacturing method of a wire including: forming a lower layer on a substrate; forming a middle layer on the lower layer; forming an upper layer on the middle layer; forming, exposing, and developing a photoresist layer on the upper layer to form a photoresist pattern; and etching the upper layer, the middle layer, and the lower layer by using the photoresist pattern as a mask to form a wire such that the upper layer covers an end of the middle layer.

主权项

1. A method of manufacturing a wire, comprising:
forming a lower layer on a substrate; forming a middle layer on the lower layer; forming an upper layer on the middle layer; forming a photoresist pattern on the upper layer using a developing process; and forming a wire by etching the upper layer, the middle layer, and the lower layer by using the photoresist pattern as a mask, wherein the upper layer covers an end of the middle layer.