VIBRATOR, OSCILLATOR, ELECTRONIC APPARATUS, MOBILE BODY, AND MANUFACTURING METHOD OF VIBRATOR

摘要

PROBLEM TO BE SOLVED: To provide a beam type vibrator which achieves downsizing, stable manufacturing yield, and lower drive frequency without increasing a length of a beam of the vibrator.SOLUTION: An MEMS vibrator 100 includes: a substrate 1; a lower electrode 10 provided on a main surface of the substrate 1; a fixing part 23 provided on the main surface; and an upper electrode 20 which is separated from the substrate 1 and is supported by the fixing part 23. The upper electrode 20 is a vibrator having a region that overlaps on the lower electrode 10 when the substrate 1 is planarly viewed and includes a weight part 50 at a region D1 including an abdominal part of vibrations of the upper electrode 20 serving as the vibrator.