| 摘要 |
PROBLEM TO BE SOLVED: To provide a thin film formation device, etc. capable of obtaining a film thickness, which is excellent in reproducibility, with high accuracy.SOLUTION: A load detection part 7 and a driving part 9 are provided below a guide part 3. The load detection part 7 serves as a pressure detection part capable of detecting a pressure of a coating film material 15 inside a dice part 5. When the pressure of the coating film material 15 in a cavity of the dice part 5 changes, a load applied to the guide part 3 changes. Thus, the load detection part 7 detects the load received from the guide part 3 thereby enabling pressure change inside the cavity to be detected. In other words, thickness change of a long member 13 can be detected. |
