| 摘要 |
PROBLEM TO BE SOLVED: To provide a scanning type probe microscope capable of improving an S/N ratio.SOLUTION: An optical path length change mechanism (e.g., a light irradiation unit movement mechanism 6) for changing an optical path length from a light irradiation unit 2 to a cantilever 1 is provided. The focal point of irradiated light from the light irradiation unit 2 can be adjusted to the cantilever 1 by changing the optical path length from the light irradiation unit 2 to the cantilever 1. This makes it possible to prevent the focal point of the irradiated light from the light irradiation unit 2 from being deviated, and thereby improve an S/N ratio. Especially, as part of the irradiated light can be prevented from protruding from the cantilever 1 composed of very small members, it is possible to effectively improve the S/N ratio which tends to decrease in a scanning type probe microscope. |
