| 摘要 |
PROBLEM TO BE SOLVED: To provide an inspection device capable of surely detecting only an intrinsic defect.SOLUTION: A template inspection device according to an embodiment comprises: an inspection image data acquisition unit 23 for acquiring inspection image data of a replica template pattern to be inspected which is disposed in a replica template to be inspected which is obtained from a master template; a comparison data generation unit 27 for generating comparison data by comparing the inspection image data of the replica template pattern to be inspected with correction reference image data obtained by correcting reference image data based on design data of a master template pattern by using inspection data of the master template pattern; and a defect determination unit 28 for determining a defect in the replica template pattern to be inspected on the basis of the comparison data. |
