CHARGED PARTICLE BEAM DEVICE

摘要

In the present invention, an evacuation structure of a charged particle beam device is provided with: a vacuum chamber to which a charged particle source is provided; a vacuum piping connected to the vacuum chamber; a main vacuum pump that is connected to the vacuum chamber via the vacuum piping and evacuates the inside of the vacuum chamber; a non-evaporative getter pump provided in the vacuum piping between the vacuum chamber and the main vacuum pump; and a coarse evacuation port connected to a position in the vacuum piping between the vacuum chamber and the non-evaporative getter pump. The coarse evacuation port is provided with a coarse evacuation valve for opening and closing the coarse evacuation port, and a leak valve for opening the vacuum chamber to the atmosphere.