LIQUID CRYSTAL DISPLAY DEVICE

摘要

The present invention is to provide a method for manufacturing, with a high mass productivity, a liquid crystal display device having a thin film transistor with good electric characteristics and high reliability. The liquid crystal display device comprises a thin film transistor of a reverse stagger type. For the reverse stagger type thin film transistor, a gate insulating film is formed on a gate electrode; a microcrystalline semiconductor film functioning as a channel formation region is formed on the gate insulating film; a buffer layer is formed on the microcrystalline semiconductor film; a pair of a source region and a drain region are formed on the buffer layer; and a pair of source electrodes and drain electrodes in contact with the source region and the drain region are formed to expose a portion of the source region and the drain region.