HYDROGEN DISTRIBUTION OBSERVATION DEVICE AND HYDROGEN DISTRIBUTION OBSERVATION METHOD

摘要

PROBLEM TO BE SOLVED: To observe the distribution of hydrogen or deuterium in a metallic material at a spatial resolution of 40 [nm] or more and less than 1 [μm].SOLUTION: The distribution of hydrogen or deuterium in a metallic material is observed at a spatial resolution of 40 [nm] or more and less than 1 [μm] using a secondary ion mass spectroscope. The secondary ion mass spectroscope includes: a sample stage 4 for supporting a sample and cooling it; a super-high vacuum sample chamber 6 in which the sample stage 4 is installed; a focused ion beam irradiation optical system 3 using, as a primary ion beam to be radiated to the sample, gallium ions capable of being converged to a beam diameter of 4 [nm] or more and less than 1 [μm]; and a secondary ion mass spectrometer 1 for detecting a secondary ion.