MANUFACTURING METHOD OF ZINC OXIDE NANOROD ARRAYS AND NANOROD ARRAYS MADE BY THE SAME AND SEMICONDUCTOR DEVICE USING THE SAME

摘要

Disclosed are a method of manufacturing zinc oxide nanorod arrays grown in a certain pattern in a predetermined region of a nitride semiconductor, and zinc oxide nanorod arrays manufactured by the same. The method includes: preparing a growth substrate having a first surface and a second surface; growing a nitride semiconductor layer on the first surface of the growth substrate; placing a support substrate on the nitride semiconductor layer; forming a mask pattern on the second surface of the growth substrate; and removing the growth substrate from the nitride semiconductor layer by providing a laser beam through the second surface of the growth substrate having the mask pattern.