| 摘要 |
PROBLEM TO BE SOLVED: To provide a thin film forming device or the like which suppresses fracture of a long member, and can increase speed of the long member as compared with a conventional device.SOLUTION: A dice 5a and a dice 5b are separately arranged on a straight line through a cylindrical part 3. Each of the dices 5a, 5b is structured of a dice part 6 on an upper part and a guide part 8 on a lower part. End parts of the cylindrical part 3 are in contact with the dices 5a, 5b through seal members 15. A decompression device 7 is connected to the cylindrical part 3. Therefore, an inside of the cylindrical part 3 is decompressed by the decompression device 7. In this case, the seal members 15 are arranged between the cylindrical part 3 and the dices 5a, 5b. Thus, leakage of air or the like from clearances between the cylindrical part 3 and the dices 5a, 5b can be prevented. The cylindrical part 3 is, for example, a silica tube. |
