| 摘要 |
PROBLEM TO BE SOLVED: To provide an optical nondestructive inspection device and an optical nondestructive inspection method capable of inspecting a measured object such as a wire bonding place and like in a shorter time with higher reliability, improving measurement accuracy, and expanding a measurement possible temperature range.SOLUTION: An optical nondestructive inspection device includes: condensing collimator means 10; a heating laser light source 21; heating laser light guiding means, first infrared ray detecting means 35, second infrared ray detecting means 31, radiation infrared ray selection light guiding means, and controlling means 50. The controlling means 50 controls the heating laser light source 21, measures temperature rising characteristics in a temperature rising state of a measurement spot SP according to heating time, on the basis of a ratio of a detection value from the second infrared ray detecting means to a detection value from the first infrared ray detecting means, determines a state of a measured object (a joint structure part 97) on the basis of the temperature rising characteristics, and changes the wavelength of an infrared ray guided to at least either one of the first infrared ray detecting means or the second infrared ray detecting means according to the measured temperature, during the measurement. |
