发明名称 CUTTING DEVICE
摘要 PROBLEM TO BE SOLVED: To shorten time required for trimming, while preventing the exhaustion of a cutting blade.SOLUTION: A holding table 121 holds platy work. A rotating portion rotates the holding table 121 while using a center of the holding table 121 as a rotation shaft. Cutting means 13a-13d are equipped with cutting blades 22 at tip ends of spindles. Cut-in feeding means brings the cutting means 13a-13d close to the holding table 121, and separates the cutting means 13a-13d from the holding table 121. A cutting device 10 brings the cutting means 13a-13d close to the holding table 121 by cut-in feeding means, and cuts in the cutting blade 22 to an outer peripheral portion of platy work held by the holding table 121. The rotating portion rotates the holding table 121 to cut the outer periphery of the platy work in a circumferential direction. The cutting device 10 is equipped with at least three cutting means 13a-13D, and the cutting means 13a-13d are disposed at equal angles around the rotation shaft of the holding table 121 in directions in which axes 134 of the spindles intersect the rotation shaft of the holding table 121.
申请公布号 JP2014210295(A) 申请公布日期 2014.11.13
申请号 JP20130086383 申请日期 2013.04.17
申请人 DISCO ABRASIVE SYST LTD 发明人 KIMURA KEN;YOSHIDA MIKI;NEGISHI KATSUHARU
分类号 B24B27/06;H01L21/304 主分类号 B24B27/06
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