发明名称 Tray Off-loader for Semiconductor Manufacturing Machine
摘要 <p>PURPOSE: A tray off loader for manufacturing a semiconductor package is provided to continuously operate an apparatus for manufacturing the semiconductor package without stop by temporarily loading a tray on a buffer unit without transferring the tray to an external device when the process is stopped or delayed in the external device. CONSTITUTION: A tray carrying unit carries trays with semiconductor packages to an external device(300) which is composed outside the body of an apparatus for manufacturing a semiconductor package. The tray transferred from the tray transfer unit is temporarily loaded on a buffer unit(240). A tray transfer unit transfers the tray from the tray carrying unit to the buffer unit when the external device is trouble.</p>
申请公布号 KR101461124(B1) 申请公布日期 2014.11.13
申请号 KR20080089886 申请日期 2008.09.11
申请人 发明人
分类号 H01L21/673;H01L21/677 主分类号 H01L21/673
代理机构 代理人
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