| 摘要 |
<p>PURPOSE: A vessel temperature controlling device is provided to rapidly control temperatures in a vessel by preheating the inside of the vessel by sensing the temperatures with a first temperature sensor part and a second temperature sensor part when the vessel is opened and by heating the inside by sensing the temperatures with a third temperature sensor part when the vessel is closed. CONSTITUTION: A semiconductor wafer is arranged in a vessel(110). A first temperature sensor part(126) outputs a first temperature signal by sensing temperatures of an upper portion. A second temperature sensor part outputs a second temperature signal by sensing temperature of a lower portion. A third temperature sensor part senses the temperature of the inside by receiving a black signal from a driving part and outputs a third temperature signal. A first heater part(124) applies heat to the inside based on the first temperature signal or the third temperature signal. A second heater part applies the heat to the inside based on the second temperature signal or the third temperature signal.</p> |
