| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide an MEMS pressure sensor capable of forming a thin diaphragm part on a substrate, deformable even at a low pressure, and capable of accurately measuring a minute pressure.SOLUTION: An MEMS pressure sensor includes: a diaphragm part that deviates according to a pressure; and a resonator formed on a principal plane of the diaphragm part. The resonator includes: a first fixed electrode formed on the principal plane; and a drive electrode having a second fixed electrode formed on the principal plane, a movable electrode separated from the first fixed electrode and configured to drive in a direction overlapping the first fixed electrode in a planar view from a normal direction of the principal plane and crossing the principal plane, and a support electrode supporting the movable electrode and connected to the second fixed electrode.</p> |
