发明名称 OPTICAL WIRING SUBSTRATE, MANUFACTURING METHOD OF OPTICAL WIRING SUBSTRATE AND OPTICAL MODULE
摘要 An optical wiring substrate includes a first conductor layer including a metal, a second conductor layer including a metal and arranged parallel to the first conductor layer, an insulation layer disposed to insulate the first conductor layer from the second conductor layer, and an electronic component including a photoelectric conversion element mounted on the substrate, and a via hole formed in the second conductor layer and the insulation layer so as to pass through the second conductor layer and the insulation layer in a thickness direction thereof, the via hole including an inner surface plated with a metal. The via hole is configured such that at least a part of a bottom surface thereof blocked by the first conductor layer is arranged in a plan view so as to overlap with an arrangement position of a pad of the electronic component that is mounted on the first conductor layer.
申请公布号 US2014332978(A1) 申请公布日期 2014.11.13
申请号 US201414250523 申请日期 2014.04.11
申请人 Hitachi Metals, Ltd. 发明人 YASUDA Hiroki;HIRANO Kouki;ISHIKAWA Hiroshi
分类号 H01L23/522;H01L21/768 主分类号 H01L23/522
代理机构 代理人
主权项 1. An optical wiring substrate, comprising: a first conductor layer comprising a metal; a second conductor layer comprising a metal and arranged parallel to the first conductor layer; an insulation layer disposed to insulate the first conductor layer from the second conductor layer; and an electronic component including a photoelectric conversion element mounted on the substrate; and a via hole formed in the second conductor layer and the insulation layer so as to pass through the second conductor layer and the insulation layer in a thickness direction thereof, the via hole comprising an inner surface plated with a metal, wherein the via hole is configured such that at least a part of a bottom surface thereof blocked by the first conductor layer is arranged in a plan view so as to overlap with an arrangement position of a pad of the electronic component that is mounted on the first conductor layer.
地址 Tokyo JP