CHROMATIC CONFOCAL MULTI-POINT MEASUREMENT METHOD AND DEVICE AND USE OF SAID DEVICE

摘要

The aim of the present invention is to provide a robust, highly dynamic method for parallelized chromatic confocal multi-point measurement, an associated device and the use thereof. According to the invention, a chromatic confocal sensor is used, each measuring point being associated with a different subrange of the entire spectral bandwidth of the measuring system. This spectral multiplexing method allows for example the transmission of the signal from a plurality of measuring points in parallel via an optical fiber and the evaluation of the signal by means of a one-dimensional detector cell. The combination of the different subranges of the spectrum with the different measurement points is preferably carried out via a special optical system which can also be designed as a supplementary element to a chromatic confocal point sensor.