| 摘要 |
<P>PROBLEM TO BE SOLVED: To restrain speckles of an illumination device using a coherent light source. <P>SOLUTION: A laser beam L50 generated by a laser source 50 is reflected by a light beam scanner 60 to irradiate a microlens array 48. Individual lenses constituting the microlens array 48 diffuses a light beam L60 made incident, and forms a predetermined irradiation region I on a receiving surface R of an illumination object 70. At this time, the microlens array 48 is constituted so that the irradiation region I is formed in the same position of the receiving surface R, regardless of the incident position of the light beam L60 on the microlens array 48. The light beam scanner 60 scans so that a bending mode of the light beam L60 is changed with time and an irradiation position to the microlens array 48 is changed with time. An illumination spot whose speckles are restrained is formed in the irradiation region I. <P>COPYRIGHT: (C)2012,JPO&INPIT |
