发明名称 Method for preparing a sample for electron microscopic investigation, the sample carrier and transport carrier used
摘要 <p>A specimen containing a substrate (10) is placed in a vacuum chamber (32) for its preparation. A protective coating (21) is applied to a carrier surface for the specimen, which, when under the protective coating, is separated from the substrate by an ion beam (19). Independent claims are also included for the following: (A) A transmission electron microscope specimen carrier; (B) and for a holder with two micro-mechanical tong elements; (C) and for a glass capillary vessel in tension.</p>
申请公布号 EP1818970(B1) 申请公布日期 2014.11.12
申请号 EP20070008533 申请日期 2004.09.16
申请人 CARL ZEISS MICROSCOPY GMBH 发明人 BURKHARDT, CLAUS, DR.;NISCH, WILFRIED, DR.
分类号 H01J37/20;B25J7/00;G01N1/32;H01J37/305 主分类号 H01J37/20
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