发明名称 |
Method for preparing a sample for electron microscopic investigation, the sample carrier and transport carrier used |
摘要 |
<p>A specimen containing a substrate (10) is placed in a vacuum chamber (32) for its preparation. A protective coating (21) is applied to a carrier surface for the specimen, which, when under the protective coating, is separated from the substrate by an ion beam (19). Independent claims are also included for the following: (A) A transmission electron microscope specimen carrier; (B) and for a holder with two micro-mechanical tong elements; (C) and for a glass capillary vessel in tension.</p> |
申请公布号 |
EP1818970(B1) |
申请公布日期 |
2014.11.12 |
申请号 |
EP20070008533 |
申请日期 |
2004.09.16 |
申请人 |
CARL ZEISS MICROSCOPY GMBH |
发明人 |
BURKHARDT, CLAUS, DR.;NISCH, WILFRIED, DR. |
分类号 |
H01J37/20;B25J7/00;G01N1/32;H01J37/305 |
主分类号 |
H01J37/20 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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